// Time-of-Flight Secondary Ion Mass Spectometry (ToF-SIMS)
The time-of-flight mass spectrometry of secondary ions is a materials characterization method which delivers laterally resolved depth profiles. Our TOF.SIMS 5 device made by IONTOF can be used to detect all elements of the periodic table.
- Detection of trace elements up to a concentration of few ppm
- Mass resolution of 12,000 which allows for a differentiation between O2 and S
- 3D depth profiling in the micrometer range with a maximal lateral resolution of 200 nm (matrix elements)
- Quantification of the depth profiles via reference samples
- Detection of entire organic modules or their fractions, masses of up to 10,000 u
- Measurement of non-conductive materials by way of charge compensation
- Measurement of mobile ions with a chilled sample holder and soft sputtering sources
- Handling of samples which are sensitive to air or water
